Product Introduction

• Part No: 602413-101
• Model No: PMAC 2-VME
• KLA-Tencor Part No: 500-22555-000, Rev. AA
• Add-On Board #1: 602414-100, PMAC 2-VME AXIS-I/O 5-8 (OPT 1)
• Add-On Board #2: 603605-103, DSP563XX FLEX CPU, KLA04180501
• Removed from a KLA-Tencor eS31 E-Beam Wafer Inspection System
• Made in the USA

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